Volume 27, Issue 2 pp. 284-292
research papers

X-ray optics and beam characterization using random modulation: theory

Sebastien Berujon

Corresponding Author

Sebastien Berujon

European Synchrotron Radiation Facility, CS 40220, F-38043 Grenoble Cedex 9, France

Sebastien Berujon, e-mail: [email protected]Search for more papers by this author
Ruxandra Cojocaru

Ruxandra Cojocaru

European Synchrotron Radiation Facility, CS 40220, F-38043 Grenoble Cedex 9, France

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Pierre Piault

Pierre Piault

European Synchrotron Radiation Facility, CS 40220, F-38043 Grenoble Cedex 9, France

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Rafael Celestre

Rafael Celestre

European Synchrotron Radiation Facility, CS 40220, F-38043 Grenoble Cedex 9, France

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Thomas Roth

Thomas Roth

European Synchrotron Radiation Facility, CS 40220, F-38043 Grenoble Cedex 9, France

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Raymond Barrett

Raymond Barrett

European Synchrotron Radiation Facility, CS 40220, F-38043 Grenoble Cedex 9, France

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Eric Ziegler

Eric Ziegler

European Synchrotron Radiation Facility, CS 40220, F-38043 Grenoble Cedex 9, France

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First published: 20 February 2020

Abstract

X-ray near-field speckle-based phase-sensing approaches provide efficient means of characterizing optical elements. Presented here is a theoretical review of several of these speckle methods within the framework of optical characterization, and a generalization of the concept is provided. As is also demonstrated experimentally in a parallel paper [Berujon, Cojocaru, Piault, Celestre, Roth, Barrett & Ziegler (2020), J. Synchrotron Rad.27, (this issue)], the methods theoretically developed here can be applied to different beams and optics and within a variety of situations where at-wavelength metrology is desired. By understanding the differences between the various processing methods, it is possible to find and implement the most suitable approach for each metrology scenario.

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