physica status solidi (RRL) – Rapid Research Letters

Volume 5, Issue 2 pp. 47-49

Rapid Research Letter

6 MHz BAW resonators fabricated using new piezoelectric crystals PrCa₄O(BO₃)₃ and NdCa₄O(BO₃)₃

Fapeng Yu,

Fapeng Yu

Materials Research Institute, Pennsylvania State University, University Park, PA 16802, USA

State Key Lab. of Crystal Materials and Institute of Crystal Materials, Shandong University, Ji'nan 250100, P.R. China

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Shujun Zhang,

Corresponding Author

Shujun Zhang

[email protected]

Materials Research Institute, Pennsylvania State University, University Park, PA 16802, USA

Phone: +01 814 863 2639, Fax: +01 814 865 2326Search for more papers by this author

Xian Zhao,

Xian Zhao

[email protected]

State Key Lab. of Crystal Materials and Institute of Crystal Materials, Shandong University, Ji'nan 250100, P.R. China

Phone: +86 531 88366330

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Duorong Yuan,

Duorong Yuan

State Key Lab. of Crystal Materials and Institute of Crystal Materials, Shandong University, Ji'nan 250100, P.R. China

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Qing-ming Wang,

Qing-ming Wang

Department of Mechanical Engineering and Materials Science, University of Pittsburgh, Pittsburgh, PA 15260, USA

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Thomas R. Shrout,

Thomas R. Shrout

Materials Research Institute, Pennsylvania State University, University Park, PA 16802, USA

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Fapeng Yu,

Fapeng Yu

Materials Research Institute, Pennsylvania State University, University Park, PA 16802, USA

State Key Lab. of Crystal Materials and Institute of Crystal Materials, Shandong University, Ji'nan 250100, P.R. China

Search for more papers by this author

Shujun Zhang,

Corresponding Author

Shujun Zhang

[email protected]

Materials Research Institute, Pennsylvania State University, University Park, PA 16802, USA

Phone: +01 814 863 2639, Fax: +01 814 865 2326Search for more papers by this author

Xian Zhao,

Xian Zhao

[email protected]

State Key Lab. of Crystal Materials and Institute of Crystal Materials, Shandong University, Ji'nan 250100, P.R. China

Phone: +86 531 88366330

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Duorong Yuan,

Duorong Yuan

State Key Lab. of Crystal Materials and Institute of Crystal Materials, Shandong University, Ji'nan 250100, P.R. China

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Qing-ming Wang,

Qing-ming Wang

Department of Mechanical Engineering and Materials Science, University of Pittsburgh, Pittsburgh, PA 15260, USA

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Thomas R. Shrout,

Thomas R. Shrout

Materials Research Institute, Pennsylvania State University, University Park, PA 16802, USA

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First published: 17 December 2010

https://doi.org/10.1002/pssr.201004505

Citations: 16

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Abstract

Thickness shear mode Bulk Acoustic Wave (BAW) resonators with frequency of 6 MHz, were fabricated using monoclinic piezoelectric crystals PrCa₄O(BO₃)₃ (PrCOB) and NdCa₄O(BO₃)₃ (NdCOB). Zero temperature coefficient of frequency (TCF) characteristics were achieved over the temperature range of –140 °C to 200 °C for (YXt)–1.5° cut PrCOB and (YXt)15° cut NdCOB, with the turnover temperature at 20 °C. The electromechanical coupling factor k₂₆ and the piezoelectric coefficient d₂₆ were determined to be 30.2% and 15.8 pC/N for PrCOB, 29.0% and 15.1 pC/N for NdCOB resonators, respectively. The temperature independent frequency behavior, large coupling factor, high piezoelectric coefficient, together with noticeable mechanical quality factors (Q > 2,500), make PrCOB and NdCOB crystals good candidates for sensing applications with expanded temperature usage range. (© 2011 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)

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Volume5, Issue2

February 2011

Pages 47-49

6 MHz BAW resonators fabricated using new piezoelectric crystals PrCa₄O(BO₃)₃ and NdCa₄O(BO₃)₃

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6 MHz BAW resonators fabricated using new piezoelectric crystals PrCa₄O(BO₃)₃ and NdCa₄O(BO₃)₃