Volume 261, Issue 11 2400029
Research Article

Characterizations of Subbandgap Optical Absorption in Undoped-GaN and 90 nm-Thick Al1−xInxN Thin Film on Sapphire Substrates Grown by Metal–Organic Chemical Vapor Deposition

Kouki Noda

Kouki Noda

Faculty of Science and Technology, Meijo University, Shiogamacuchi, Tempaku-ku, Nagoya, 468-8502 Japan

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Yuto Murakami

Yuto Murakami

Faculty of Science and Technology, Meijo University, Shiogamacuchi, Tempaku-ku, Nagoya, 468-8502 Japan

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Hayata Toyoda

Hayata Toyoda

Faculty of Science and Technology, Meijo University, Shiogamacuchi, Tempaku-ku, Nagoya, 468-8502 Japan

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Kana Shibata

Kana Shibata

Faculty of Science and Technology, Meijo University, Shiogamacuchi, Tempaku-ku, Nagoya, 468-8502 Japan

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Youna Tsukada

Youna Tsukada

Faculty of Science and Technology, Meijo University, Shiogamacuchi, Tempaku-ku, Nagoya, 468-8502 Japan

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Daichi Imai

Corresponding Author

Daichi Imai

Faculty of Science and Technology, Meijo University, Shiogamacuchi, Tempaku-ku, Nagoya, 468-8502 Japan

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Tetsuya Takeuchi

Tetsuya Takeuchi

Faculty of Science and Technology, Meijo University, Shiogamacuchi, Tempaku-ku, Nagoya, 468-8502 Japan

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Makoto Miyoshi

Makoto Miyoshi

Nagoya Institute of Technology, Gokiso-cho, Showa-ku, Nagoya, 466-8555 Japan

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Takao Miyajima

Takao Miyajima

Faculty of Science and Technology, Meijo University, Shiogamacuchi, Tempaku-ku, Nagoya, 468-8502 Japan

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First published: 19 May 2024

Abstract

Subbandgap optical absorption (SOA) in undoped GaN and 90 nm-thick Al1−xInxN thin films grown on sapphire substrates is investigated using photothermal deflection spectroscopy (PDS) and photoluminescence (PL). An Al1−xInxN alloy (x = 0.17) is grown on a GaN/sapphire template by metal–organic chemical vapor deposition (MOCVD), and the SOA is observed using PDS. To develop an estimation method for the absorption coefficient (α) of SOA in GaN and Al1−xInxN thin films, the use of a thick GaN substrate is proposed, which is grown by hydride vapor-phase epitaxy, as a converter of the PDS signal intensity to α, and the accuracies of the estimated α are discussed. Comparing the PDS and PL results, it is revealed that nonradiative recombination centers leading to the reduction of the near-band-edge PL intensity are not the dominant sources of SOAs in GaN. Other in-gap states formed by impurities and/or their complexes with vacancy-type defects are possible sources of a large SOA in the MOCVD-grown GaN template. Considering the PDS results and reported peak reflectivity of Al1−xInxN/GaN distributed Bragg reflectors, the α value of sub-100 nm-thick Al1−xInxN alloy grown on GaN/sapphire template is expected to be ≈100 cm−1 or less below 3.0 eV.

Conflict of Interest

The authors declare no conflict of interest.

Data Availability Statement

The data that support the findings of this study are available from the corresponding author upon reasonable request.

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