Volume 259, Issue 11 2100641
Research Article

Monte Carlo Simulation of Alternate Pulsed Epitaxial Growth of GaAs Nanowires

Alla G. Nastovjak

Corresponding Author

Alla G. Nastovjak

A.V. Rzhanov Institute of Semiconductor Physics of the Siberian Branch of the Russian Academy of Sciences, 630090 Novosibirsk, Russia

Novosibirsk State Technical University, 630073 Novosibirsk, Russia

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David V. Shterental

David V. Shterental

Novosibirsk State Technical University, 630073 Novosibirsk, Russia

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Nataliya L. Shwartz

Nataliya L. Shwartz

A.V. Rzhanov Institute of Semiconductor Physics of the Siberian Branch of the Russian Academy of Sciences, 630090 Novosibirsk, Russia

Novosibirsk State Technical University, 630073 Novosibirsk, Russia

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First published: 06 April 2022
Citations: 1

Abstract

The Monte Carlo simulation of a self-catalyzed GaAs nanowire (NW) growth regime is proposed and realized, where gallium and arsenic are deposited in pulsed intervals. Such a pulsed epitaxial growth mode allows low-temperature epitaxial growth of long GaAs NWs. The influence of gallium and arsenic pulse durations and sequences on the NW morphology is investigated. The catalyst droplet size and contact angle, as well as the diffusion length of Ga adatoms along the NW sidewalls, determine the wire morphology. For a dense NW array, the arsenic readsorption starts to affect the NW growth. The influence of arsenic readsorption on the formation of Ga liquid droplets on the NW sidewalls is investigated with the help of annealing simulations. The significant role of the mass transfer of evaporated materials is demonstrated for GaAs NW morphology.

Conflict of Interest

The authors declare no conflict of interest.

Data Availability Statement

The data that support the findings of this study are available from the corresponding author upon reasonable request.

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