Volume 259, Issue 4 2100598
Research Article

Cathodoluminescence Study of m-Plane α-Ga2O3 Grown by Mist Chemical Vapor Deposition

Ryo Moriya

Corresponding Author

Ryo Moriya

Department of Electrical and Electronic Engineering, Ritsumeikan University, 1-1-1 Noji-higashi, Kusatsu-shi, Shiga, 525-8577 Japan

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Junjiro Kikawa

Junjiro Kikawa

Department of Electrical and Electronic Engineering, Ritsumeikan University, 1-1-1 Noji-higashi, Kusatsu-shi, Shiga, 525-8577 Japan

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Shinichiro Mouri

Shinichiro Mouri

Department of Electrical and Electronic Engineering, Ritsumeikan University, 1-1-1 Noji-higashi, Kusatsu-shi, Shiga, 525-8577 Japan

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Takashi Shinohe

Takashi Shinohe

FLOSFIA Inc., 1-36 Goryo-ohara, Nishikyo-ku, Kyoto, 615-8245 Japan

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Shiyu Xiao

Shiyu Xiao

Graduate School of Regional Innovation Studies, Mie University, 1577 Kurimamachicho, Tsu-shi, Mie, 514-8507 Japan

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Hideto Miyake

Hideto Miyake

Graduate School of Regional Innovation Studies, Mie University, 1577 Kurimamachicho, Tsu-shi, Mie, 514-8507 Japan

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Tsutomu Araki

Tsutomu Araki

Department of Electrical and Electronic Engineering, Ritsumeikan University, 1-1-1 Noji-higashi, Kusatsu-shi, Shiga, 525-8577 Japan

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First published: 18 January 2022
Citations: 2

Abstract

The cathodoluminescence (CL) properties of m-plane α-Ga2O3 grown by mist chemical vapor deposition are investigated. The m-plane α-Ga2O3 is found to have two types of characteristic luminescence bands: blue luminescence (BL) band (centered at 2.8 eV) and UV luminescence (UVL) band (centered at 3.7 eV). To characterize these bands, the Sn concentration and temperature dependences of the CL spectra are investigated using samples with varying Sn concentrations from 1 × 1017 to 1 × 1019 cm−3. The Sn concentration-dependent CL spectra show that the luminescence from the UVL band is dominant in the low Sn concentration region, while that from the BL band is dominant in the high Sn concentration region. The temperature-dependent CL spectra indicate that the peak intensity of the UVL band depending on temperature is larger than that of the BL band. The activation energies in the UVL band of the undoped and lightly Sn-doped samples are determined as 110 meV. In addition, the parameters of the Huang–Rhys factor in the UVL band are obtained as 28.6 and 18.8, respectively. These results strongly suggest that the UVL band is derived from self-trapped excitons, which is the recombination of free electrons and self-trapped holes.

Conflict of Interest

The authors declare no conflict of interest.

Data Availability Statement

Research data are not shared.

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