Volume 132, Issue 2 pp. K75-K80
Short Note
Full Access

YAG Laser Annealing Used to Produce Poly-Si Films

X. Geng

X. Geng

Department of Electronic Science, Nan Kai University, Tianjin

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C. Wu

C. Wu

Department of Electronic Science, Nan Kai University, Tianjin

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Z. Yu

Z. Yu

Department of Electronic Science, Nan Kai University, Tianjin

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G. Wang

G. Wang

Department of Electronic Science, Nan Kai University, Tianjin

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Z. Chen

Z. Chen

Department of Electronic Science, Nan Kai University, Tianjin

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Z. Sun

Z. Sun

Department of Electronic Science, Nan Kai University, Tianjin

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W. Xu

W. Xu

Department of Electronic Science, Nan Kai University, Tianjin

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First published: 16 August 1992
Citations: 1

Tianjin 300071, People's Republic of China.

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