physica status solidi (a)
Volume 91, Issue 2 pp. K125-K127
Short Note
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Characterization of Lattice Damage in Ion Implanted Silicon: Monte Carlo Simulation Combined with Double Crystal X-Ray Diffraction†

F. Cembali, 

F. Cembali

Consiglio Nazionale delle Ricerche, Istituto LAMEL, Bologna

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A. M. Mazzone, 

A. M. Mazzone

Consiglio Nazionale delle Ricerche, Istituto LAMEL, Bologna

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M. Servidori, 

M. Servidori

Consiglio Nazionale delle Ricerche, Istituto LAMEL, Bologna

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First published: 16 October 1985
https://doi.org/10.1002/pssa.2210910254
Citations: 6
†

Dedicated to Prof. Dr. Dr. h.c. Dr. E.h. P. GÖRLICH on the occasion of his 80th birthday

‡

Via Castagnoli 1, 40126 Bologna, Italy.

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