Correctness of a particular solution of inverse problem in rocking curve imaging

Local lattice misorientations on crystalline substrates can be visualized by rocking curve imaging. Local deviations from Bragg peak positions are extracted from a series of digital topographs recorded by a CCD detector under different azimuths. Bragg peaks from surface regions such as crystallites with a larger local misorientation overlap on the detector, which requires a back-projection method in order to reconstruct the misorientation components on the sample surface from the measured angular position on the detector planes. From mathematical point of view, the reconstruction problem is an inverse problem. In this paper, we formulate the forward and back-projection problems and we prove the correctness of a particular solution. The usability of the method is demonstrated on a phantom data set.