A new method for the measurement of the ionized-impurity concentration in high-purity materials is proposed. Experimental results are given for n-type silicon samples. These results are then compared with those obtained by conventional methods.

References

1 J. Laplume, L'onde électronique 35, 114 (1955).
Google Scholar
2 L. J. van der Pauw, Philips Res. Rep. 13, 1 (1958).
Google Scholar
3 A. M. Goodman, J. appl. Phys. 34, 329 (1963).
10.1063/1.1702608
CAS Web of Science® Google Scholar
4 F. J. Walter and R. R. Boshart, IEEE Trans. Nuclear Sci. 13, 189 (1966).
10.1109/TNS.1966.4324098
CAS Web of Science® Google Scholar
5 A. Alberigi Quaranta, M. Martini, G. Ottaviani, G. Redaelli, and G. Zanarini, Solid State Electronics 11, 685 (1968).
10.1016/0038-1101(68)90072-5
Web of Science® Google Scholar
6 M. Martini and G. Ottaviani, Nuclear Instrum. and Methods 67, 177 (1969).
10.1016/0029-554X(69)90561-8
Web of Science® Google Scholar
7 P. A. Tove and K. Falk, Nuclear Instrum. and Methods 12, 278 (1961).
10.1016/0029-554X(61)90142-2
Web of Science® Google Scholar
8 G. Cavalleri, G. Fabri, E. Gatti, and V. Svelto, Nuclear Instrum. and Methods 21, 177 (1963).
10.1016/0029-554X(63)90106-X
Web of Science® Google Scholar
9 A. Alberigi Quaranta, G. Casadei, M. Martini, G. Ottaviani, and G. Zanarini, Nuclear Instrum. and Methods 35, 93 (1965).
10.1016/0029-554X(65)90013-3
Web of Science® Google Scholar
10 P. A. Tove and K. Falk, Nuclear Instrum. and Methods 29, 66 (1964).
10.1016/0029-554X(64)90011-4
Web of Science® Google Scholar
11 A. C. Prior, J. Phys. Chem. Solids 12, 175 (1959).
10.1016/0022-3697(60)90034-2
Web of Science® Google Scholar
12 T. E. Seidel and D. L. Scharfetter, J. Phys. Chem. Solids 28, 2563 (1967).
10.1016/0022-3697(67)90043-1
CAS Web of Science® Google Scholar
13 M. Asche, B. L. Boitschenko, and O. G. Sarbej, phys. stat. sol. 9, 323 (1965).
10.1002/pssb.19650090203
CAS Web of Science® Google Scholar
14 A. Alberigi Quaranta, M. Martini, and G. Ottaviani, IEEE Trans. Nuclear Sci. 16, 35 (1969).
10.1109/TNS.1969.4325151
Web of Science® Google Scholar
15 F. J. Walter, W. T. Dabbs, and L. D. R. Roberts, Proc. Conf. Nuclear Electronics, Belgrade, May 15 to 20, 1961, Vol. I, Brüder Rosenbaum, Vienna 1962 (p. 391).
Google Scholar
16 P. Siffert, H. Rougeot, and A. Coche, Nuclear Electronics, Proc. Int. Symp. Organized by S. F. E. R., Paris November 25 to 27, 1963, O. C. D. E., Paris Archiv (p. 155).
Google Scholar
17 A. Alberigi Quaranta, A. Taroni, and G. Zanarini, IEEE Trans. Nuclear Sci. 15, 373 (1968).
10.1109/TNS.1968.4324961
Web of Science® Google Scholar
18 F. Morin and J. Maita, Phys. Rev. 96, 28 (1954).
10.1103/PhysRev.96.28
CAS Web of Science® Google Scholar
19 F. Gutberlet-Vieweg, Arch. tech. Mess. 339, 81 (1964);
Google Scholar
Arch. tech. Mess. 340, 109 (1964).
Google Scholar
20 C. Munakata, Japan. J. appl. Phys. 6, 63 (1967).
Google Scholar
21 A. Alberigi Quaranta, C. Canali, G. Ottaviani, A. Taroni, and G. Zanarini, to be published in IEEE Trans. Nuclear Sci.
Google Scholar

Citing Literature

Volume1, Issue2

16 February 1970

Pages 315-322

A new method for measuring the ionized-impurity concentration in high-purity materials

Abstract

References

Citing Literature

References

Information

About Wiley Online Library

Help & Support

Opportunities

Connect with Wiley

A new method for measuring the ionized-impurity concentration in high-purity materials

Abstract

References

Citing Literature

References

Related

Information