Journal of Polymer Science Part A: Polymer Chemistry

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The effect of power on the plasma-assisted deposition of fluorinated monomers

R. d'Agostino

C.N.R.–Centro di Studio per la Chimica dei Plasmi, Department of Chemistry, University of Bari, 4, Trav. 200 Re David, 70126 Bari, Italy

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P. Favia,

P. Favia

C.N.R.–Centro di Studio per la Chimica dei Plasmi, Department of Chemistry, University of Bari, 4, Trav. 200 Re David, 70126 Bari, Italy

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F. Fracassi,

Corresponding Author

F. Fracassi

C.N.R.–Centro di Studio per la Chimica dei Plasmi, Department of Chemistry, University of Bari, 4, Trav. 200 Re David, 70126 Bari, Italy

C.N.R.-Centro di Studio per la Chimica dei Plasmi, Department of Chemistry, University of Bari, 4, Trav. 200 Re David, 70126 Bari, ItalySearch for more papers by this author

F. Illuzzi,

F. Illuzzi

Central R&D SGS, THOMSON Microelectronics, via Olivetti 2, 20041 Agrate Brianza (MI), Italy

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R. d'Agostino,

R. d'Agostino

C.N.R.–Centro di Studio per la Chimica dei Plasmi, Department of Chemistry, University of Bari, 4, Trav. 200 Re David, 70126 Bari, Italy

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P. Favia,

P. Favia

C.N.R.–Centro di Studio per la Chimica dei Plasmi, Department of Chemistry, University of Bari, 4, Trav. 200 Re David, 70126 Bari, Italy

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F. Fracassi,

Corresponding Author

F. Fracassi

C.N.R.–Centro di Studio per la Chimica dei Plasmi, Department of Chemistry, University of Bari, 4, Trav. 200 Re David, 70126 Bari, Italy

C.N.R.-Centro di Studio per la Chimica dei Plasmi, Department of Chemistry, University of Bari, 4, Trav. 200 Re David, 70126 Bari, ItalySearch for more papers by this author

F. Illuzzi,

F. Illuzzi

Central R&D SGS, THOMSON Microelectronics, via Olivetti 2, 20041 Agrate Brianza (MI), Italy

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First published: November 1990

https://doi.org/10.1002/pola.1990.080281217

Citations: 34

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Abstract

The effect of power variation on the polymerization kinetics and on the polymer structure is reported for RF glow discharges fed with C₂F₆–H₂ mixtures. Both deposition rate and polymer structure trends can be correlated to the variations of gas-phase species density (atoms, radicals, and charged species) and can be explained by considering the competition of the deposition and etching process.

References

1 H. P. Schreiber, M. R. Wertheimer, and A. M. Wrobel, Thin Solid Films, 72, 487 (1980).
10.1016/0040-6090(80)90536-2
CAS Web of Science® Google Scholar
2 F. Yamagishi, D. D. Granger, E. A. Schimitz, and L. J. Miller, Thin Solid Films, 84, 427 (1981).
10.1016/0040-6090(81)90183-8
Web of Science® Google Scholar
3 Y. Asano, H. Yamazaki, and A. Morinak, Jpn. J. Appl. Phys., 22, 480 (1983).
10.1143/JJAP.22.480
Web of Science® Google Scholar
4 R. d'Agostino, P. Capezzuto, G. Bruno, and F. Cramarossa, Pure Appl. Chem., 57, 1287 (1985).
10.1351/pac198557091287
CAS Web of Science® Google Scholar
5 M. Strobel, S. Corn, C. S. Lyons, and G. A. Korba, J. Polym. Sci. Polym. Chem. Ed., 23, 1125 (1985).
10.1002/pol.1985.170230417
CAS Web of Science® Google Scholar
6 R. d'Agostino, F. Cramarossa, V. Colaprico, and R. d'Ettole, J. Appl. Phys., 54, 1264 (1983).
Google Scholar
7 F. Fracassi, E. Occhiello, and J. W. Coburn, J. Appl. Phys., 69, 3980 (1987).
10.1063/1.339197
Web of Science® Google Scholar
8 R. d'Agostino, F. Cramarossa, F. Fracassi, E. De Simoni, L. Sabbatini, P. G. Zambonin, and G. Caporiccio, Thin Solid Films, 143, 163 (1986).
10.1016/0040-6090(86)90384-6
CAS Web of Science® Google Scholar
9 R. d'Agostino, F. Cramarossa, and F. Illuzzi, J. Appl. Phys., 61, 2754 (1987).
10.1063/1.337864
CAS Web of Science® Google Scholar
10 R. d'Agostino, F. Fracassi, V. Colaprico, and F. Illuzzi, Proceedings of the 9th International Symposium on Plasma Chemistry (ISPC-9), Pugnochiuso, Italy, 1989, 1098.
Google Scholar
11 J. W. Coburn, and M. Chen, J. Appl. Phys., 51, 3143 (1981).
Google Scholar
12 R. d'Agostino, F. Cramarossa, S. De Benedictis, and G. Ferraro, J. Appl. Phys., 52, 1259 (1981).
10.1063/1.329748
CAS Web of Science® Google Scholar
13 H. J. Tiller, D. Berg, and R. Mohr, Plasma Chem. Plasma Proc., 1, 247 (1981).
10.1007/BF00568833
CAS Google Scholar
14 L. Laska, K. Masek, and R. d'Agostino, Acta Phys. Slovaca, 35, 199 (1984).
Web of Science® Google Scholar
15 R. d'Agostino, F. Cramarossa, and S. De Benedictis, Plasma Chem. Plasma Proc., 2, 213 (1982).
10.1007/BF00566521
CAS Google Scholar
16 P. Montazer Rahmati, F. Arefi, J. Amoroux, A. Ricard, Proc. Of the 9th Internal Symposium on Plasma Chemistry (ISPC-9), Pugnochiuso, Italy, 1989, p. 1167.
Google Scholar
17 M. Strobel and C. S. Lyons, Proceedings of the ACS Division of Polymer Materials: Science and Engineering, Denver, American Chemical Society Washington, DC, 1987, p. 232.
Google Scholar
18 J. C. Manifacier, J. Phys., 9, 213 (1983).
10.1088/0305-4616/9/2/014
Web of Science® Google Scholar
19 E. C. Freeman, and W. Paul, Phys. Rev. B, 20, 716 (1979).
10.1103/PhysRevB.20.716
CAS Web of Science® Google Scholar

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Volume28, Issue12

November 1990

Pages 3387-3402

The effect of power on the plasma-assisted deposition of fluorinated monomers

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The effect of power on the plasma-assisted deposition of fluorinated monomers

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