Measurement Technology
Free Access
A high-precision length measuring technique for laboratory and industry
Multibeam interferometers measure dynamic parameters simultaneously and with nanometer precision over a length of up to 80 m
First published: 12 January 2022
Abstract
In the medical technology, semiconductor, and optics industries, as well as for calibration tasks, the highest accuracy is always required. Laser interferometers measure displacements with an accuracy up to 0.1 ppm and connect the macro world with the nano world through the unique property of measuring large ranges with enormous resolutions.
