Trends in Manufacturing
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Pulsed laser deposition – materials that matter
Scalable, modular PLD systems drive high volume production of game-changing functional layers
Abstract
Pulsed laser deposition (PLD) is the thin film method of choice for depositing complex oxide films and highly textured epitaxial layers with unsurpassed crystallinity. Excimer laser power scalability and PLD process upscaling have resulted in the first systems with 300 mm wafer capability now entering the market. From mobile communication to autonomous driving, novel materials available to high-tech volume manufacturing matter in transitioning into a 5G connected future.
