Microwave and Optical Technology Letters

Volume 64, Issue 3 pp. 603-608

RESEARCH ARTICLE

High-finesse nanoscale displacement sensor based on fiber optic polymer probe

Fuzheng Zhang,

Fuzheng Zhang

State Key Laboratory of Mechanical Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, China

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Qijing Lin,

Qijing Lin

State Key Laboratory of Mechanical Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, China

Collaborative Innovation Center of High-End Manufacturing Equipment, Xi'an Jiaotong University, Xi'an, China

Xi'an Jiaotong University Suzhou Institute, Industrial Park, Suzhou, China

State Key Laboratory of Mechanical System and Vibration, Shanghai Jiaotong University, Shanghai, China

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Na Zhao,

Corresponding Author

Na Zhao

[email protected]

State Key Laboratory of Mechanical Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, China

Correspondence

Na Zhao, State Key Laboratory of Mechanical Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, Shaanxi 710049, China.

Email: [email protected]

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Fuzheng Zhang,

Fuzheng Zhang

State Key Laboratory of Mechanical Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, China

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Qijing Lin,

Qijing Lin

State Key Laboratory of Mechanical Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, China

Collaborative Innovation Center of High-End Manufacturing Equipment, Xi'an Jiaotong University, Xi'an, China

Xi'an Jiaotong University Suzhou Institute, Industrial Park, Suzhou, China

State Key Laboratory of Mechanical System and Vibration, Shanghai Jiaotong University, Shanghai, China

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Na Zhao,

Corresponding Author

Na Zhao

[email protected]

State Key Laboratory of Mechanical Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, China

Correspondence

Na Zhao, State Key Laboratory of Mechanical Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, Shaanxi 710049, China.

Email: [email protected]

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First published: 06 December 2021

https://doi.org/10.1002/mop.33108

Fuzheng Zhang and Qijing Lin contributed equally to this study.

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Abstract

As an important branch in the field of precision measurement, optical fiber micro-displacement measurement plays an increasingly important role in the fields of precision machining, bioengineering, and so forth. In this paper, an optical fiber probe with high coupling efficiency is prepared based on photopolymerization, and on the basis of this structure, a new type of nanoscale displacement sensor is designed and implemented. The sensitivity and linear fitting coefficient of the designed sensor are 0.00289 dBm/nm and 98.8% in the range of 0–1000 nm, respectively. The proposed sensor is highly stable and persistent, has the advantages of high sensitivity, simple structure, low cost of production, and easy operation, which has major advantages in the application of precision displacement sensing field.

Open Research

DATA AVAILABILITY STATEMENT

The data that support the findings of this study are available from the corresponding author upon reasonable request.

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Volume64, Issue3

March 2022

Pages 603-608

High-finesse nanoscale displacement sensor based on fiber optic polymer probe

Abstract

Open Research

DATA AVAILABILITY STATEMENT

REFERENCES

References

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High-finesse nanoscale displacement sensor based on fiber optic polymer probe

Abstract

Open Research

DATA AVAILABILITY STATEMENT

REFERENCES

References

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