Volume 71, Issue 12 pp. 74-82
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An analysis of semiconductor waveguides with strip-shaped plasma and their applications

Hitoshi Shimasaki

Hitoshi Shimasaki

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Faculty of Engineering, Osaka University, Suita, Japan 565

Hitoshi Shimasaki graduated in 1985 from Dept. of Communication Engineering, Osaka University, and obtained an M.S. degree in 1987. Presently, he is working toward a Ph.D. degree and studying millimeter-waved integrated circuits containing semiconductors.

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Makoto Tsutsumi

Makoto Tsutsumi

Member

Faculty of Engineering, Osaka University, Suita, Japan 565

Makoto Tsutsumi graduated in 1961 from Dept. of Electrical Engineering, Ritsumeikan University, and obtained an M.S. degree from Osaka University in 1963. Assistant in Dept. of Communication Engineering of Osaka University. Engineering, and was promoted to Lecturer in 1974 and to an Associate Professor in 1984. Since then he has been working on magnetostatic waves, magnetoelastic waves and surface acoustic waves. taining ferrite and semiconductors. In 1964 he became an He has a doctorate in Presently, he is engaged in research on millimeter-wave integrated circuits connections. He is a member of Applied Physics Society, and IEEE.

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Nobuaki Kumagai

Nobuaki Kumagai

Member

Faculty of Engineering, Osaka University, Suita, Japan 565

Nobuaki Kumagai graduated in 1953 from Dept. of Communication Engineering, Osaka University (Old System). In 1971, he was promoted to Professor. After serving as a research student in graduate school and as a Visit-ing Senior Research Fellow at the Electronics Research Laboratory of University of California, he earned a doctorate in Engineering and became an Associate Professor of Communication Engineering at Osaka University in 1960. He is a member of Institute of Electrical Engineers of Japan; the Laser Society; and an IEEE Fellow.

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Abstract

When a high-resistivity semiconductor is used as a waveguide medium which is illuminated optically so that the electron-hole plasma is excited, its permittivity changes and the control of the propagation characteristics of the millimeter-wave becomes possible. This paper studies the effect of the plasma layer width on the propagation characteristics in a waveguide with plasma induced on the grounded semiconductor slab. The hybrid guided mode was analyzed by means of the mode matching method. It is found that the attenuation of the wave increases as the plasma layer width is decreased if the plasma density per unit area is more than 1017.5 m−2. Further, the obtained results were extended and the characteristics of an optically controlled coupler made of dielectric waveguides were analyzed.

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