Structural Characterization of a Polyaluminosilazane Precursor Prepared by Polymerizing Hexamethylcyclotrisilazane with Aluminum Acetylacetonate†
Dedicated to Professor ZHOU Wei-Shan on the occasion of his 80th birthday.
Abstract
A new polyaluminosilazane precursor was prepared by polymerizing hexamethylcyclotrisilazane (HMCTS) with aluminum acetylacetonate and the structure of the precursor was characterized by FT-IR and XPS analysis. Result shows that aluminum was incorporated mainly in form of Al—N bond. Oxygen was also detected and found that it was mainly bonded to silicon.