This chapter discusses the approaches that aim to overcome Boltzmann population statistics. These hyperpolarization techniques rely on the transfer of a large polarization source to the target nuclear spin system, or the preparation of pure spin states that are transferred into the target spin system. The chapter summarizes the current state-of-the-art of hyperpolarization strategies, with emphasis on microelectromechanical systems (MEMS) fabrication and have postulated about where such techniques could lead in the near future. Surface and/or bulk micromachining techniques could play an important role to drive the instrumentation roadmap for dynamic nuclear polarization (DNP) toward ever higher frequencies. In spin exchange by optical pumping (SEOP) for nuclear magnetic resonance (NMR) and magnetic resonance imaging (MRI), both the optical cell and the quality of the light reaching the cell are of utmost importance, particularly at the microscale.