Summary

Nano and submicron ceramic oxide fibers of tin oxide (SnO2) are processed using the polymer fibers as templates. Highly porous fibrous mat of hydroxypropyl cellulose (HPC) polymer is obtained via electrospinning technique. In order to derive the ceramic oxide fibers using the polymer fibers as templates, the electrospinning characteristics of the HPC polymer is established by varying the critical processing parameters such as polymer concentration, solvent type, tip-to-electrode distance, feeding speed, and applied voltage. Nano and submicron fibers of SnO2 are deposited on the microelectromechanical system (MEMS) device, consisting oxidized silicon (Si/SiO2) wafer with gold (Au) electrode pattern. In conclusion, a very effective polymer assisted processing of ceramic oxide nano and submicron fibers is demonstrated for the low temperature gas sensing application.

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