Chapter 10

Femtosecond Laser Microfabrication of Photonic Crystals

Vygantas Mizeikis

Vygantas Mizeikis

Research Institute for Electronic Science, Hokkaido University, North 21 – West 10, CRIS Bldg., Sapporo 001-0021, Japan

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Shigeki Matsuo

Shigeki Matsuo

Graduate School of Engineering, Department of Ecosystems Engineering, The University of Tokushima, 2-1 Minamijosanjima, 770-8606 Tokushima, Japan

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Saulius Juodkazis

Saulius Juodkazis

Research Institute for Electronic Science, Hokkaido University, North 21 – West 10, CRIS Bldg., Sapporo 001-0021, Japan

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Hiroaki Misawa

Hiroaki Misawa

Research Institute for Electronic Science, Hokkaido University, North 21 – West 10, CRIS Bldg., Sapporo 001-0021, Japan

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First published: 06 June 2006
Citations: 5

Summary

This chapter contains sections titled:

  • Microfabrication of Photonic Crystals by Ultrafast Lasers

    • Nonlinear Absorption of Spatially Nonuniform Laser Fields

    • Mechanisms of Photomodification

  • Photonic Crystals Obtained by Direct Laser Writing

    • Fabrication by Optical Damage in Inorganic Glasses

    • Fabrication by Optical Damage in Organic Glasses

    • Lithography by Two-photon Solidification in Photo-curing Resins

    • Lithography in Organic Photoresists

      • Structures with Woodpile Architecture

      • Structures with Spiral Architecture

  • Lithography by Multiple-beam Interference

    • Generation of Periodic Light Intensity Patterns

    • Practical Implementation of Multiple-beam Interference Lithography

    • Lithographic Recording of Periodic Structures by Multiple-beam Interference

      • Two-dimensional Structures

      • Three-dimensional Structures

  • Conclusions

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