Correlation between Growth Induced Structure, Stress and Relaxation in Thin Films

Frank Hubenthal

Frank Hubenthal

Universität Gh Kassel, Germany

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Thomas Conradi

Thomas Conradi

Universität Gh Kassel, Germany

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Klaus Röll

Klaus Röll

Universität Gh Kassel, Germany

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Tomasz Stobiecki

Tomasz Stobiecki

University of Mining and Metallurgy, Kraków, Poland

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First published: 27 June 2000

Summary

Stresses in thin films are well known phenomena and one can find various explanations on the origin of the stresses, but the effect of the layer growth induced structure, i.e. columnar or oblique angle, is very often neglected. In this contribution we present two different examples which show the important influence of the growth induced film structure (briefly: structure) on internal stresses and stress relaxation processes.

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