Correlation between Growth Induced Structure, Stress and Relaxation in Thin Films
Summary
Stresses in thin films are well known phenomena and one can find various explanations on the origin of the stresses, but the effect of the layer growth induced structure, i.e. columnar or oblique angle, is very often neglected. In this contribution we present two different examples which show the important influence of the growth induced film structure (briefly: structure) on internal stresses and stress relaxation processes.