Crystal Order Restoration and Zn-Impurity Activation in InP by As⁺-Coimplantation and Annealing

I. M. Tiginyanu

Institute of Applied Physics, Academic str. 5, 2028 Kishinev, Moldova Phone:++3732738171, Fax:++3732738149

Institut für Hochfrequenztechnik, TH Darmstadt, Merckstr. 25, D-64283 Darmstadt, Germany

I. V. Kravetsky

Institute of Applied Physics, Academic str. 5, 2028 Kishinev, Moldova Phone:++3732738171, Fax:++3732738149

Laser-Laboratorium Göttingen e.V., Hans-Adolf-Krebs-Weg 1, D-37077 Göttingen, Germany

V. V. Ursaki

Institute of Applied Physics, Academic str. 5, 2028 Kishinev, Moldova Phone:++3732738171, Fax:++3732738149

G. Marowsky

Laser-Laboratorium Göttingen e.V., Hans-Adolf-Krebs-Weg 1, D-37077 Göttingen, Germany

H. L. Hartnagel

Institut für Hochfrequenztechnik, TH Darmstadt, Merckstr. 25, D-64283 Darmstadt, Germany