Volume 162, Issue 2 pp. 731-738
Research Article

Investigation of Thin Film Waveguides Using Leaky Modes for Laser Applications

J. Boudiombo

J. Boudiombo

Laboratoire Matériaux Optiques à Propriétés Specifiques (MOPS), CLOES, Université de Metz et Supélec, 2, rue E. Belin, F-57078 Metz, Cedex 03, France

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A. Boudrioua

A. Boudrioua

Laboratoire Matériaux Optiques à Propriétés Specifiques (MOPS), CLOES, Université de Metz et Supélec, 2, rue E. Belin, F-57078 Metz, Cedex 03, France

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J. C. Loulergue

J. C. Loulergue

Laboratoire Matériaux Optiques à Propriétés Specifiques (MOPS), CLOES, Université de Metz et Supélec, 2, rue E. Belin, F-57078 Metz, Cedex 03, France

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A. Bath

A. Bath

Laboratoire Interfaces Composants et Microelectronique (LICM), CLOES, Université de Metz et Supélec, 2, rue E. Belin, F-57078 Metz, Cedex 03, France

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P. Thevenin

P. Thevenin

Laboratoire Interfaces Composants et Microelectronique (LICM), CLOES, Université de Metz et Supélec, 2, rue E. Belin, F-57078 Metz, Cedex 03, France

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Abstract

Leaky modes have been observed and investigated. A simple method is used to evaluate refractive index and thickness by solving the “so-called” mode equation. Application and tests of the assessments are made using a thin film of SiOxNy elaborated by the PECVD technique. From the measured TE and TM mode spectra, it is found that the films are isotropic with good confinement of the light wave. Results are in good agreement with those reported by many authors for such kind of materials.

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