Surface and Thin-Film Analysis, 4 Photon Detection
Abstract
The article contains sections titled:
1. |
Total-Reflection X-ray Fluorescence Analysis (TXRF) |
1.1. |
Principles |
1.2. |
Instrumentation |
1.3. |
Spectral Information |
1.4. |
Quantification |
1.5. |
Applications |
1.5.1. |
Particulate and Film-Type Surface Contamination |
1.5.2. |
Semiconductors |
1.5.2.1. |
Depth Profiling by TXRF and Multilayer Structures |
1.5.2.2. |
Vapor Phase Decomposition (VPD) and Droplet Collection |
2. |
Glow Discharge Optical Emission Spectroscopy (GD-OES) |
2.1. |
Principles |
2.2. |
Instrumentation |
2.3. |
Spectral Information |
2.4. |
Quantification |
2.5. |
Depth Profiling |
2.6. |
Applications |
3. |
Surface-Sensitive IR and Raman Spectroscopy; Ellipsometry |
3.1. |
Reflection - Absorption IR Spectroscopy (RAIRS) |
3.1.1. |
Principles |
3.1.2. |
Instrumentation and Applications |
3.2. |
Surface Raman Spectroscopy |
3.2.1. |
Principles |
3.2.2. |
Surface-Enhanced Raman Scattering (SERS) |
3.2.2.1. |
Instrumentation |
3.2.2.2. |
Spectral Information |
3.2.2.3. |
Applications |
3.2.3. |
Nonlinear Optical Spectroscopy |
3.3. |
UV - VIS - IR Ellipsometry (ELL) |
3.3.1. |
Principles |
3.3.2. |
Instrumentation |
3.3.3. |
Applications |
4. |
Other Photon-Detecting Techniques |
4.1. |
Appearance-Potential Methods |
4.1.1. |
Soft X-Ray Appearance-Potential Spectroscopy (SXAPS) |
4.1.2. |
Disappearance-Potential Spectroscopy (DAPS) |
4.2. |
Inverse Photoemission Spectroscopy (IPES) and Bremsstrahlung Isochromat Spectroscopy (BIS) |
4.3. |
Ion-Beam Spectrochemical Analysis (IBSCA) |