Vacuum Technology

1.	Introduction
2.	Fundamental Aspects of Vacuum Science and Technology
2.1.	Basic Principles and Terminology
2.1.1.	Pressure Regimes
2.1.2.	Equation of State of Gases
2.1.3.	Kinetic Theory
2.1.4.	Flow Regimes and Knudsen Number
2.1.5.	Vacuum Pump Characteristics
2.1.6.	Conductance
2.1.7.	Pump-Out Equation
2.2.	Vacuum Gas Dynamics
2.2.1.	Numerical Simulation Approaches
2.2.2.	Pipe Flows
3.	Vacuum Pumps
3.1.	Positive Displacement Vacuum Pumps
3.1.1.	Reciprocating Positive Displacement Pumps
3.1.2.	Rotary Positive Displacement Pumps
3.1.2.1.	Single Shaft Rotary Positive Displacement Pumps
3.1.2.2.	Twin Shaft Rotary Positive Displacement Pumps
3.2.	Kinetic Vacuum Pumps
3.2.1.	Working Fluid Jet Pumps
3.2.2.	Turbomolecular Pumps
3.2.3.	Vapor Diffusion Pumps
3.3.	Entrapment Vacuum Pumps
3.3.1.	Sputter Ion Pumps
3.3.2.	Getter Pumps
3.3.3.	Cryopumps
4.	Vacuum Diagnostics
4.1.	Total Pressure Measurement
4.1.1.	Mechanical Vacuum Instruments
4.1.2.	Transport Coefficient Instruments
4.1.3.	Ionization Vacuum Gauges
4.2.	Partial Pressure Measurement
4.3.	Leaks
5.	Vacuum System Components
5.1.	Piping Components
5.2.	Valves
6.	Vacuum Applications and Examples
6.1.	Aspects of Vacuum System Design
6.2.	Examples of Vacuum Systems
6.2.1.	Steel Degassing
6.2.2.	Thin Film Deposition
6.2.3.	Vacuum Systems of Fusion Devices
6.2.4.	Ultrahigh Vacuum Systems of Accelerator Storage Rings

References

1 DIN 28400: Vacuum Technology – terms and definitions, Beuth Verlag, Berlin 1990.
Google Scholar
2 A. Chambers: Modern Vacuum Physics, Chapman & Hall, London 2005.
Google Scholar
3 C. Shen: Rarefied Gas Dynamics, Springer Verlag, Berlin 2005.
10.1007/b138784
Google Scholar
4 K. Ploog (ed.): Crystals, Growth, Properties, and Applications, Springer Verlag, Berlin 1980, pp. 73–162.
Google Scholar
5 L. Füstöss, G. Toth: “The Problem of the Compounding of Transmission Probabilities for Composite Systems”, J. Vac. Sci. Technol. 9 (1972) 1214–1217.
10.1116/1.1317015
ADS Web of Science® Google Scholar
6 C.W. Oatley: “The flow of gas through composite systems at very low pressures”, Brit. J. Appl. Phys. 8 (1957) 15–18.
10.1088/0508-3443/8/1/305
CAS ADS Web of Science® Google Scholar
7 C. Cercignani: The Boltzmann Equation and its Applications, Springer Verlag, Berlin 1988.
10.1007/978-1-4612-1039-9
Google Scholar
8 V. Aristov: Direct Methods for Solving the Boltzmann Equation and Study of Nonequilibrium Flows, Springer Verlag, Berlin 2001.
10.1007/978-94-010-0866-2
Google Scholar
9 G.A. Bird: Molecular Gas Dynamics and the Direct Simulation of Gas Flows, Oxford University Press, Oxford 1994.
10.1093/oso/9780198561958.001.0001
Google Scholar
10 G.L. Saksaganskii: Molecular Flow in Complex Vacuum Systems, Gordon and Breach, New York 1988.
Google Scholar
11 R. Kersevan, J.-L. Pons: “Introduction to MOLFLOW+”, J. Vac. Sci. Technol. A 27 (2009) 1017–1023.
10.1116/1.3153280
CAS Web of Science® Google Scholar
12 X. Luo, C. Day: “Investigation of a new Monte Carlo method for the transitional gas flow”, in 27th Int. Symp. on Rarefied Gas Dynamics, Pacific Grove, CA, USA, July 2010, AIP Conf. Proc. 1333 (2011) 272–277.
ADS Web of Science® Google Scholar
13 F. Sharipov, V. Seleznev: “Data on internal rarefied gas flow”, J. Phys. Chem. Ref. Data 27 (1998) 657–706.
10.1063/1.556019
CAS ADS Web of Science® Google Scholar
14 R.A. Haefer: Cryopumping, Clarendon Press, Oxford 1989.
Web of Science® Google Scholar
15 K. Jousten (ed.): Handbook of Vacuum technology, Wiley-VCH Verlag, Weinheim 2008.
Google Scholar
16 J.M. Lafferty (ed.): Foundations of vacuum science and technology, J. Wiley & Sons, New York 1998.
Google Scholar
17 T. Giegerich, C. Day: “Conceptuation of a continuously working vacuum pump train for fusion power plants”, Fus. Eng. Des. 88 (2013) 2206–2209.
10.1016/j.fusengdes.2013.05.019
CAS Web of Science® Google Scholar
18 P. Manini P. Manini, A. Conte, L. Viale, A. Bonucci, L. Caruso: “A novel rout to compact high performance pumping in UHV-XHV vacuum systems”, Vacuum 94 (2013) 26–29.
10.1016/j.vacuum.2013.01.017
CAS ADS Web of Science® Google Scholar
19 C.B. Hood: “The development of large cryopumps from space chambers to the fusion program,” J. Vac. Sci. Technol. A3 (1985) 1684–1689.
10.1116/1.573000
ADS Web of Science® Google Scholar
20 Chr. Day, H. Haas, St. Hanke, V. Hauer, X. Luo, M. Scannapiego, R. Simon, H. Strobel, F. Fellin, R. Lässer, A. Masiello, St. Papastergiou, M. Dremel, Chr. Mayaux, R. Pearce: “Design progress for the ITER torus and neutral beam cryopumps”, Fus. Eng. Des. 86 (2011) 2188–2191.
10.1016/j.fusengdes.2010.11.023
CAS Web of Science® Google Scholar
21 K.F. Poulter: “Effect of gas composition on vacuum measurement,” J. Vac. Sci. Technol. A2 (1984) 150–158.
10.1116/1.572712
ADS Web of Science® Google Scholar
22 Evaluation of measurement data — Guide to the expression of uncertainty in measurement, ISO Guide 100, Geneve, 2008, corrected version 2010.
Google Scholar
23 J.K. Fremerey: “The spinning rotor gauge”, J. Vac. Sci. Technol. A3 (1985) 1715–1720.
10.1116/1.573007
ADS Web of Science® Google Scholar
24 F. Watanabe: “Point collector ionization gauge with spherical grid for measuring pressures below 10⁻¹¹Pa”, J. Vac. Sci. Technol. A5 (1987) 242–248.
10.1116/1.574112
ADS Web of Science® Google Scholar
25 D. Lichtman: “Perspectives on residual gas analysis”, J. Vac. Sci. Technol. A2 (1984) 200–205.
10.1116/1.572723
ADS Web of Science® Google Scholar
26 S.S. Rosenblum: “Vacuum outgassing rates of plastics and composites for electrical insulators”, J. Vac. Sci. Technol. A4 (1986) 107–110.
10.1116/1.573480
ADS Web of Science® Google Scholar
27 J.R. Chen, K. Narushima, H. Ishimaru: “Thermal outgassing from aluminum alloy vacuum chambers”, J. Vac. Sci. Technol. A3 (1985) 2188–2191.
10.1116/1.573276
ADS Web of Science® Google Scholar
28 N. Yoshimura: “A differential pressure-rise method for measuring the net outgassing rates of a solid material and for estimating its characteristic values as a gas source”, J. Vac. Sci. Technol. A3 (1985) 2177–2183.
10.1116/1.573274
ADS Web of Science® Google Scholar
29 E.D. Erikson, T.G. Beat, D.D. Berger, B.A. Frazier: “Vacuum outgassing of various materials”, J. Vac. Sci. Technol. A2 (1984) 206–210.
10.1116/1.572724
ADS Web of Science® Google Scholar
30 C. Edelmann: Vakuumphysik, Spektrum Akademischer Verlag, Leipzig 1997.
Google Scholar
31 L. Laurenson, N.T.M. Dennis: “Permeability of common elastomers for gases over a range of temperatures”, J. Vac. Sci. Technol. A3 (1985) 1707–1710.
10.1116/1.573005
ADS Web of Science® Google Scholar
32 C. Day: “The use of active carbons as cryosorbent”, Colloids and Surfaces A (2001) 187–206.
10.1016/S0927-7757(01)00630-6
Web of Science® Google Scholar
33 V. Hauer V. Hauer, J.-C. Boissin, Chr. Day, H. Haas, A. Mack, D. Murdoch, R. Lässer, M. Wykes: “Design of the ITER prototype torus cryopump”, Fus. Eng. Des. 82 (2007) 2113–2119.
10.1016/j.fusengdes.2007.07.039
CAS Web of Science® Google Scholar

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