Plasma Reactions

1.	Introduction
1.1.	History
1.2.	Categorization of Technical Plasmas
1.3.	Thermal and Nonthermal Plasmas
1.4.	Applications of Thermal and Non-thermal Plasmas
2.	Nonthermal Plasmas
2.1.	Generation of Nonthermal Plasmas
2.2.	Nonthermal Plasma Reactors
2.3.	Nonthermal Plasma Coupling
2.4.	Industrial Use of Nonthermal Plasmas
2.4.1.	Principle Processes
2.4.2.	Thin Film Coating
2.4.3.	Plasma Etch processes
2.4.4.	Plasma Sputtering
2.4.5.	Plasma Functionalization
2.4.6.	Plasma Polymerization
3.	Thermal Plasmas
3.1.	Generation of Thermal Plasmas
3.2.	Arc Plasma Principles
3.3.	Arc Plasma Generators
3.3.1.	Nontransferred and Transferred Arcs
3.3.2.	High-Current and High-Voltage Arcs
3.3.3.	Electrode Shapes
3.4.	RF Plasma Generators
4.	Plasma Reactors
4.1.	Single-Stage and Two-Stage Designs
4.2.	Chemical and Physical Reactions in Plasma Reactors
5.	Industrial Uses of Thermal Plasmas
5.1.	Production of Acetylene from Hydrocarbons
5.1.1.	Hüls Arc Process
5.1.2.	Hoechst-Knapsack Process
5.2.	Production of Acetylene from Coal
5.3.	Production of Reduction Gases
5.4.	Production and Processing of Powders
5.4.1.	Plasma Processing of Carbon Nanotubes, Fullerene, and Carbon Black Powders.
5.4.2.	Production of Ceramic Powders
5.4.3.	Plasma Processing of Ceramic and Metallic Powders
5.5.	Diamond and Diamond-like Coatings
5.6.	Pollution Control
6.	Diagnostic Methods

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