A comprehensive source of references is to be found in the Proceedings of the International Conference of Microelectronic Test Structures, sponsored by the IEEE Electron Devices Society.
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M. Syrzycki
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M. Fallon et al. A novel test structure to measure emitter-base misalignment,
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H. H. Berger
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C. Hess et al. Control of application specific interconnection on gate arrays using an active checkerboard test structure,
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