Semiconductor Factory Control and Optimization
Abstract
The sections in this article are
- 1 Control in Breadth
- 2 Generic Model of the Elements of a Controller
- 3 Control in Depth
- 4 Change Management
- 5 Statistical Process Control
- 6 Run-to-Run Model-Based Process Control
- 7 Equipment Signal Monitoring, Real-Time Fault Detection and Classification
- 8 Sensors
- 9 In Situ Particle Monitors
- 10 In-Line Defect Monitoring and Contamination Control
- 11 Wafer Position Tracking
- 12 Data Mining and Data Warehousing
- 13 Parametric and Yield Outlier Control
- 14 Wafer Level Reliability Control
- 15 Multivariate SPC, Especially for Equipment Signal Monitoring
- 16 Acknowledgments
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Reading List
- SEMATECH: http://www.sematech.org
- I300I (dedicated to 300mm issues): http://www.i300i.org
- National Technology Roadmap: http://www.sematech.org/public/roadmap/index.htm
- Semiconductor Subway: http://www-mtl.mit.edu/semisubway.html
- Semiconductor Equipment and Materials International (SEMI): http://www.semi.org
- Semiconductor Research Corporation (SRC): http://www.semi.org/
- Semiconductor International: http://www.semiconductor-intl.com
- Solid State Technology: http://www.solid-state.com/
- Semiconductor Online: http://www.semiconductoronline.com/
- Semiconductor SuperSite.Net: http://supersite.net/semin2/docs/home.htm
- FabTech: http://www.fabtech.org
- TechWeb: http://www.techweb.com/
- Semiconductor Process Equipment and Materials Network: http://www.smartlink.net/∼bmcd/semi/cat.html
- Semiconductor.Net—The Semiconductor Manufacturing Industry Resource for Products, Services and Information: http://www.semiconductor.net/
- SemiSource, Semiconductor Resource Guide, published annually by Semiconductor International
- Solid State Technology Resource Guide, published annually by Solid State Technology
- American Vacuum Society (AVS) Buyers Guide: http://www.aip.org/avsguide
- R. J. Muirhead Aspects of Multivariate Statistical Theory, New York: Wiley, 1982.
General
Conferences and Supporting Organizations
- Electrochemical Society, Inc., http://www.electrochem.org/
- American Vacuum Society (AVS) Manufacturing Science and Technology Group (MSTG): http://www.cems.umn.edu/∼weaver/mstg/mstg-subway.html
- International Symposium on Semiconductor Manufacturing (ISSM): http://www.issm.com
- Advanced Semiconductor Manufacturing Conference (ASMC): http://www.semi.org/Education/asmc/main.html
- SPIE Microelectronic Manufacturing: http://www.spie.org/info/mm/
SC Control and Control Software
- University of Michigan Controls Group: http://www.engin.umich.edu/research/controls/
- Berkeley Computer Aided Manufacturing (BCAM): http://radon.eecs.berkeley.edu/
- Maryland University, The Institute for Systems Research: http://www.isr.umd.edu/
- SEMATECH & MIT Run by Run Benchmarking: http://www-mtl.mit.edu/rbrBench/
- TRIANT Technologies, Inc.: http://www.triant.com/
- Semy: http://www.semy.com
- Domain Solution Corp (formerly, BBN Domain Corp.), Cambridge, MA: http://www.domaincorp.com
- Umetrics, Winchester, MA: http://www.umetri.se (also good Chemometrics links)
- Brookside Software: http://www.brooksidesoftware.com/
- Brooks Automation, Richmond, BC, Canada: http://www.brooks.com/bac.htm
- Real Time Performance, Sunnyvale, CA: http://www.rp.com
- ControlWORKS, Dallas, TX: http://www.ti.com/control
- Fastech: http://www.fastech.com
- Voyan Technology, Santa Clara, CA
- V. Bakshi Fault Detection and Classification (FDC) Software Benchmarking Results, SEMATECH Technol. Rep. 97123433A-TR, 1998.
- V. Bakshi Fault Detection and Classification Software for Plasma Etchers: Summary of Commercial Product Information, SEMATECH Technol. Rep. 97083337A-XFR, 1997.
Manufacturing Execution Systems (MES)/Computer Integrated Manufacturing (CIM)/Equipment Integration Automation: Software Used to Run and Track Fab, Perform SPC, etc
- Fastech, http://www.fastech.com
- Real Time Performance, Sunnyvale, CA: http://www.rp.com
- Consillium: http://www.consilium.com/about/about.htm
- Promis: http://www.promis.com
- T. Byrd A. Maggi Challenges to plug and play CIM, Future Fab International, pp. 77–81.
- M. Greig A. Weber AMD & ObjectSpace, Inc., Future Fab International, pp. 73–74.
Inspection Tools
- KLA-Tencor, San Jose, CA: http://www.kla-tencor.com
- Orbot (owned by Applied Materials), Santa Clara, CA: http://www.appliedmaterials.com/products/pdc.html
- Inspex: (508) 667-5500.
- OSI, Fremont, California: (510) 490-6400.
Optical Review/SEM/EDS Analysis
- Ultrapointe (distributed by KLA-Tencor), San Jose, CA: http://www.ultrapointe.com/Ultrapointe/home.htm
- Leica, Deerfield, IL: http://www.leica.com
- JEOL, Peabody, MA: http://www.jeol.com
- FEI, Hillsboro, OR: [email protected]
- Hitachi Scientific Instruments, Mountain View, CA: (650) 969-1100.
- Opal (owned by Applied Materials), Santa Clara, CA: http://www.appliedmaterials.com/products/pdc.html
- Noran Instruments Inc., Middleton, WI: http://www.noran.com
- Oxford Instruments Inc., Concord, MA: http://www.oxinst.com
Data Analysis, Data Warehousing, Data Mining, Bit Mapping, Wafer Tracking, Etc
- Knight's Technlogy, Sunnyvale, CA: http://www.knights.com
- DYM, Bedford, MA: http://www.dym.com
- LPA Software, South Burlington, VT: (802) 862-2068
- Quadrillion, Company Information: http://www.quadrillion.com/quadinfo.htm
- DeviceWare Corporation: http://www.dware.com/
- Maestro, Data Management [JJT Inc.]: http://www.jjt.com/data.man.html
- Sleuthworks: http://www.sleuthworks.com/doc/
- SAS: http://www.sas.com
- KLA-Tencor, San Jose, CA: http://www.kla-tencor.com
Reliability, Parametric Testing
- Keithley Instruments Semiconductor Products: http://www.keithley.com/TIG/SBU/
Citing Literature
Wiley Encyclopedia of Electrical and Electronics Engineering
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