Isolation Technology

Mark T. Bohr

Mark T. Bohr

Intel Corporation, Hillsboro, OR

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Shahriar S. Ahmed

Shahriar S. Ahmed

Intel Corporation, Hillsboro, OR

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First published: 27 December 1999

Abstract

The sections in this article are

  • 1 Basic Isolation Requirements
  • 2 Locos Isolation
  • 3 Enhancements to Locos
  • 4 Shallow Trench Isolation
  • 5 Twin Well CMOS
  • 6 Bipolar Junction Transistor Isolation
  • 7 Silicon-on-Insulator Isolation
  • 8 Latchup

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