Isolation Technology
First published: 27 December 1999
Abstract
The sections in this article are
- 1 Basic Isolation Requirements
- 2 Locos Isolation
- 3 Enhancements to Locos
- 4 Shallow Trench Isolation
- 5 Twin Well CMOS
- 6 Bipolar Junction Transistor Isolation
- 7 Silicon-on-Insulator Isolation
- 8 Latchup