Abstract
The sections in this article are
- 1 Semiconductor Pattern Generation
- 2 Types of Electron-Beam Lithography Systems
- 3 Scan Architecture
- 4 Pattern Generation
- 5 Electron-Beam Resists and Processes
- 6 Electron-Beam Resist Tone
- 7 Polymeric Resists
- 8 Summary
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Wiley Encyclopedia of Electrical and Electronics Engineering
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