Volume 34, Issue 2 pp. 193-198
Article

Preparation of functionally gradient fluorocarbon polymer films by plasma polymerization of NF3 and propylene

Akimasa Tasaka

Akimasa Tasaka

Department of Molecular Science and Technology, Faculty of Engineering, Doshisha University, Tanabe-cho, Tsuzuki-gun, Kyoto 610-03, Japan

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Akiko Komura

Akiko Komura

Department of Molecular Science and Technology, Faculty of Engineering, Doshisha University, Tanabe-cho, Tsuzuki-gun, Kyoto 610-03, Japan

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Yoshiharu Uchimoto

Yoshiharu Uchimoto

Division of Energy and Hydrocarbon Chemistry, Graduate School of Engineering, Kyoto University, Sakyo-ku, Kyoto 606-01, Japan

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Minoru Inaba

Corresponding Author

Minoru Inaba

Division of Energy and Hydrocarbon Chemistry, Graduate School of Engineering, Kyoto University, Sakyo-ku, Kyoto 606-01, Japan

Division of Energy and Hydrocarbon Chemistry, Graduate School of Engineering, Kyoto University, Sakyo-ku, Kyoto 606-01, JapanSearch for more papers by this author
Zempachi Ogumi

Zempachi Ogumi

Division of Energy and Hydrocarbon Chemistry, Graduate School of Engineering, Kyoto University, Sakyo-ku, Kyoto 606-01, Japan

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Abstract

Fluorocarbon polymer films were prepared by plasma polymerization using nitrogen trifluoride (NF3) and propylene as starting materials. To improve their adhesiveness to substrates, a novel functionally gradient film in which the content of fluorine decreased continuously from the surface to the interior was prepared by changing source gas composition during deposition. This film had a smooth and pinhole-free surface, and had a high contact angle (110°) for water drop. In addition, it showed good adhesion to a glass substrate. © 1996 John Wiley & Sons, Inc.

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